Thin Films Material Technology: Sputtering Of Compound Materials

Authors:Kiyotaka Wasa, Makoto Kitabatake, Hideaki Adachi
Publisher: Springer, Berlin
Keywords: compound, materials, sputtering, technology, films, material, thin
Number of Pages: 518
Published: 2004-09
List price: $171.15
ISBN-10: 3540211187
ISBN-13: 9783540211181

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